During this paper, the new lapping slurry and sprucing slurry are released. As well as the deliquescence diploma of CLBO is fallen to least expensive. A brand new Doing work technological know-how is also adopted. Following tough polishing, the focus of extremely-precision sprucing slurry is enhanced correctly. So does the extremely-precision sprucing pace, plus the wiping speed is faster as opposed to deliquescence speed. The CLBO crystal surface area roughness can reach 1nm and continue to keep the surface top quality properly. Entry by means of your establishment
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We summarized The existing advancement status with the significant-electric power DUV laser both for the wavelength of FHG in the 1-μm laser and at 193 nm. The recent progress in the good-state/fiber laser, and also the nonlinear optical crystals, prompts not just the standard electrical power but also the beam good quality (coherence) of your DUV lasers to an unprecedented stage.
As an example, The existing concave OC could be replaced by a aircraft mirror which could mitigate the facility density within the area of M1 as well as the diamond. What's more, employing high injury threshold coatings for M1 and diamond would also Enhance the output ability without any damages. Then, the NIR laser on the 2nd Stokes wavelength may be high sufficient, and also its fantastic beam high-quality, to generate the final DUV laser at 193 nm having a high average power.
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A result of the thermal lens result while in the good-state lasers, Should the heating administration is insufficient, It is far from effortless to obtain the stable-state laser that has a large power plus a higher beam excellent concurrently. Lately, with the development of The skinny disk laser and one-crystal fiber (SCF) laser, a large-electric power laser at the elemental wavelength (1 μm) had been realized with a fantastic beam quality even with a TEM00 mode beam [4,24], which might be good candidates for the fundamental in the DUV laser era. One more prospect for the basic could be the significant-ability fiber laser which can be achieved by coherent beam mix with M2 price a lot less than 1.
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The beam profile demonstrated in Determine 7b shown a very good beam high quality as one of several merits of Raman laser, which would be useful to deliver a 193-nm DUV laser with a top quality beam.
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